SEM-EDS
The Scanning Electron Microscope is one of the more powerful instruments for studying the morphological structure of different materials. As the electrons also produce the ionization of the atoms present in the sample,, the addition of x-ray detectors brings the additional value of studying the elemental composition of the inspected samples.
The microscope available at NSIL features a variable vacuum sample chamber, thus allowing to analyse biological samples without the risk of altering their morphology by the losses of moisture from the tissues.
The instrument has the following characteristics:
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Imaging solution
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Hydrated specimens,
Non-conductors, Conductors
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Resolution
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from 3nm (@30kV SE) to 10nm
(@3kV SE)
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Acceleration voltage
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0.2-30kV
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Magnification
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<5 – 1000000x
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Field of view
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6mm at AWD
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X-ray geometry
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8.5mm AWD and 35º take-off
angle
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X-ray detector
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SDD, 50 mm2 area
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Pressure range
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10-3000Pa with air
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Detectors
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BSD, 3 SED for 3 different
levels of pressure
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Chamber dimension
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365mm (Ø) x 275mm (h)
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Specimen stage
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5 motorized axes: X
(125mm), Y (125mm), Z (50mm), T (0-90º), R (360º)
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Image processing
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Resolution up to 3072x2304
pixel
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